- Sturdy junction
- Certified calibration report
- Calibration service & maintenance consultation
- Application
- measure temperature stable time and temperature uniformity; calibrate the accuracy of temperature setting; assess the impact of load capacity; measure the temperature distribution of wafer; inspect the thermal stress from center to edge of the wafer
- Extra high accuracy wire available
- Temperature Monitoring System
- WaferBLE connects to data collector TW-DC2301 via Bluetooth to transmit real-time temperature data; displays and stores records and provides statistics
- Data Collector TW-DC2301
- resolution 0.01 °C, accuracy 0.01 °C; also measures resistance and voltage
- WaferBLE
- retrieve, report, analyze and visualize data; heat map and line chart tools
- Tablet
- preconfigured Microsoft Surface Pro 9 with Windows 11