Wafer
RTD
High-accuracy RTD wafer NEW
Designed for processes that need high-accuracy temperature measurement, such as photoresist processing and wafer probers. The RTD sensors, bonding and encapsulation materials and 4-wire measurement are what make it accurate and stable.
Measures and records wafer temperature through loading, ramp, steady state, cooling and unloading
Optimises wafer processes and supplies data to SPC systems
Qualification testing after tool start-up, repair or upgrade
Calibration service and analysis software available
Specifications
- Temperature range
- -100 ~ 300 °C
- Wafer size
- 6" / 8" / 12"
- Element
- Thin-film platinum, 100 Ω / 1000 Ω at 0 °C
- Alpha value
- 0.00385
- Accuracy
- ±0.1 °C absolute, ±0.03 °C sensor-to-sensor (±0.05 °C at 0 °C on request)
- Resolution
- 0.01 °C
- Measuring points
- 1 ~ 160
- Connection
- 3-wire or 4-wire
- Connector
- D-Sub / Miniature
Can't find an exact match?
Tell us your temperature range, mounting and dimensions and our engineers will design it for you.