High-accuracy RTD wafer
Designed for processes that need high-accuracy temperature measurement, such as photoresist processing and wafer probers. The RTD sensors, bonding and encapsulation materials and 4-wire measurement are what make it accurate and stable.
- Measures and records wafer temperature through loading, ramp, steady state, cooling and unloading
- Optimises wafer processes and supplies data to SPC systems
- Qualification testing after tool start-up, repair or upgrade
- Calibration service and analysis software available
- Temperature range
- -100 ~ 300 °C
- Wafer size
- 6" / 8" / 12"
- Element
- Thin-film platinum, 100 Ω / 1000 Ω at 0 °C
- Alpha value
- 0.00385
- Accuracy
- ±0.1 °C absolute, ±0.03 °C sensor-to-sensor (±0.05 °C at 0 °C on request)
- Resolution
- 0.01 °C
- Measuring points
- 1 ~ 160
- Connection
- 3-wire or 4-wire
- Connector
- D-Sub / Miniature
