Multi-point profile thermocouples, TC wafers and RTD wafers with the WaferBLE monitoring and analysis system for wafer temperature uniformity.
For semiconductor and solar processes, built from high-accuracy, ultra-low-contamination materials and precision-grade wire for low deviation and high repeatability.
Custom TC wafers for measuring stabilisation time and uniformity, calibrating set points, assessing load effects and checking centre-to-edge thermal stress.
| Type | Wire diameter | Max. temperature | Accuracy |
|---|---|---|---|
| R, S | 0.127 mm | 1200 °C | ±0.6 °C or 0.1 % |
| R, S | 0.254 mm | 1300 °C | ±0.6 °C or 0.1 % |
| K | 0.127 / 0.254 mm | 700 °C | ±1.1 °C or 0.4 % |
| T | 0.127 / 0.254 mm | 400 °C | ±0.5 °C or 0.1 % |
| PL II | 0.254 mm | 1200 °C | ±1.1 °C or 0.4 % |
Specify wafer size, temperature range, number of points, connector and calibration. BLE versions stream to a tablet or laptop.
17 products, grouped by type. Specifications as published by Thermoway; custom versions available on request.
Specifications for TC wafers, RTD wafers, the WaferBLE monitoring system and TW-DC2301 data collector, plus calibration service and ordering information.
PDF · 2.3 MB
Tell us your temperature range, mounting and dimensions and our engineers will design it for you.