Resistance temperature detectors (RTD)

Pt100 General Purpose

RTD for General Purpose

Material of Protection Tube

SUS306, SUS314

Outside Diameter (OD)

4.8Ø (According to customer demand)

Wire

R.T.D wire

Temperature

350 ℃

Pt100 with screw

Material of Protection Tube

SUS316, SUS304

Outside Diameter (OD)

3.2ø (According to customer demand)

Screw

According to customer demand

Wire

R.T.D Wire

Temperature

350 ℃

Pt100 with protection tube

RTD Sensor for Acid/Alkali Application

Flexible sealed Teflon RTD sensor for wet, corrosive, and acid/alkali materials

THERMOWAY's acid/alkali-resistant RTD sensors are sealed with a double-layer Teflon tubing, providing a completely leak-proof design and perfect isolation from liquids, corrosive substances, and acid and alkali media. They are primarily used in semiconductor chemical pickling tanks.

THERMOWAY offers customized services, tailoring various RTD types and styles to meet specific requirements. A variety of connectors are available.

• Teflon (PTFE and PFA) tubing offers superior chemical-proof quality beyond that of stainless steel
• Flexible tube can be used on devices with curved sections and inside pipes

High accuracy

DIN A, 1/3 DIN, 1/5 DIN, 1/10 DIN

Working temperature range

-190 ~ 260 °C

Tube selection

Teflon PTFE, PFA

RTD symbol

Pt100, Pt1000, Pt200

Explosion Proof RTD

TS flameproof and dust-ignition-proof type approval issued by ITRI (Industrial Technology Research Institute)

Flameproof

Ex d IIC T6 Gb X

Dust ignition-proof

Ex tD A21 IP67 T85 °C X

Sensing element

Pt100

Certified model

EX-11-A-PT100-S

Standards

CNS 3376-0, CNS 3376-1, CNS 15591-0, CNS 15591-1

Ambient temperature

-20 ~ +40 °C

Pt100 Teflon (Type 1)

Product name

Pt100 acid/alkali-resistant RTD

Material of Protection Tube

SUS316, SUS304 (with outer Teflon protection tube)

Wire Spec.

R.T.D wire

Using Surrounding

Strong acid and strong alkali environments

Pt100 Teflon (Type 2)

Product name

Pt100 acid/alkali-resistant RTD

Material of Protection Tube

SUS316, SUS304 (with outer Teflon protection tube)

Wire Spec.

R.T.D wire

Using Surrounding

Acid, Alkaline

Pt100 Teflon (Type 3)

Product name

Pt100 acid/alkali-resistant RTD

Material of Protection Tube

SUS316, SUS304 (with outer Teflon protection tube)

Wire Spec.

R.T.D wire

Using Surrounding

Acid, Alkaline

Food Grade RTD

Product name

RTD for the food industry

Material of Protection Tube

316SS/316L

Tube OD

Made to customer requirements

Screw

Made to customer requirements

Explosion proof head

KNC/KSC

Temperature range

600℃

High Pressure Fast Responsive RTD

RTD for Frozen Environment

Product name

Wall-mounted RTD for freezers and cold storage

Material of Protection Tube

SUS316

Tube OD

9.5ø

Explosion proof head

Connection head/KF/terminal block/IPS67

Wire Spec.

R.T.D wire

Temperature range

-100℃

RTD CU 10Ω

High Accuracy RTD Wafer

Designed for processes that need high-accuracy temperature measurement, such as photoresist processing and wafer probers. The RTD sensors, bonding and encapsulation materials and 4-wire measurement are what make it accurate and stable.

• Measures and records wafer temperature through loading, ramp, steady state, cooling and unloading
• Optimises wafer processes and supplies data to SPC systems
• Qualification testing after tool start-up, repair or upgrade
• Calibration service and analysis software available

Temperature range

-100 ~ 300 °C

Wafer size

6" / 8" / 12"

Element

Thin-film platinum, 100 Ω / 1000 Ω at 0 °C

Alpha value

0.00385

Accuracy

±0.1 °C absolute, ±0.03 °C sensor-to-sensor (±0.05 °C at 0 °C on request)

Resolution

0.01 °C

Measuring points

1 ~ 160

Connection

3-wire or 4-wire

Connector

D-Sub / Miniature

Thin Film RTD Elements

Ceramic RTD Elements Type 1

Ceramic RTD Element Type 2

Glass Coated RTD Element Type 1

Glass Coated RTD Element Type 2

RTD for measuring seawater Temp.

Product name

RTD thermometer for seawater

Material of Protection Tube

MONEL

Tube OD

Made to customer requirements

Wire Spec.

PVC wire / 3W

Connector

Made to customer requirements

Temperature range

-10~80℃

※ The meter can be purchased and configured as the customer specifies